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shrpsy produces key structural elements for semiconductor equipment, filling the gap in domestic market. We utilize ultra purity materials, advance process technology and machining techniques to provide high-performance and cost-effective products for cus-tomers.Materials used in semiconductor equipment components of SHRPSY, including:
These materials are covalently bonded and generally have excellent wear resistanc-e. Compared with conventional materials, such as quartz,polysilicon,they have adva-ntages onwear resistance,especially in wafer processing technology of corrosion en-vironment.Semiconductor equipment components of SHRPSY mainly used in wafer processing such as , chemical vapor deposition, lithography and heat trea-tment, the main products are as follows:
| ¨ Cover rings | ¨ Nozzles |
| ¨ Mandrels | ¨ Bushings |
| ¨ Focus rings | ¨ Power transmission windows |
| ¨ Wafer chucks | ¨ Shields |
| ¨ Insulators | ¨ Heat sinks |
| ¨ Gas distribution plates | ¨ Chamber liners |
| ¨ Thermocouple protection tubes | ¨ Bearings and guide rails |



