ITO Glass in Touch Panel, ITO Thin Film Coating Equipment, Ag, SiO Layer Coating, ITO High Transmission Coater

Standard applications:  PET, high quality glass substrate. Like eletronic display, ITO coated microscope slide, Transparent shielding glass, conducting glass, defrosting film, De-icing film coating, 

Machine Built Time:  2012, China.

Application: AR film, ITO film, conductive coating etc. 

Technical Configurations: 

1) DC Sputtering Sources:  Cu, Al, ITO 

2) MF Sputtering Sources

3) Turbo Molecular pump + Backing Pump group 

4) High-intensity magnetic field to improve ITO film quality,   target utilization rate >30%

5) Cu, Al, Si targets utilization rate > 35%

6) Deposition Rate: 30nm m/min ~ 40nm m/min 

7) Sputtering Uniformity Area: 350mm 

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