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Series of crucibles for semiconductor level: RBC4
RBC4 is produced with material of higher purity UNIMIN IOTA 6 sands and advanced cleaning procedure, applicable for semiconductor market.
Material Sector: In view of the impurities such as aluminum and boron in quartz, the formula of the special chemical reagents for the removal of aluminum, boron and sodium in quartz is studied. The content of aluminum impurities in quartz raw materials is lower than that of 7.5 ppm, and the content of 0.1 ppm is lower than that of 0.02 ppm.
Cleaning Procedure Sector: Separately Cleaning Process. Automatic Cleaning system assure the cleaning quality. DI water is monitored by on-line detection. The Resistivity of DI water for spaying system can be controlled above 16 Megohm.
Quartz Crucibles – Typical Sizes & Tolerances(mm)
| Part number | 18 " | 20 " | 22 " | 24 " | |
| RBC-18324A01CP | RBC-20375A01CP | RBC-22406A01CP | RBC24381A01CP | ||
| Outer diameter | 457 ± 2 | 503 ± 2 | 556 ± 2 | 610 ± 3 | |
| Height | 324 ± 2 | 375 ± 2 | 406 ± 2 | 381 ± 3 | |
| Thickness of sidewall | Vertical side wall | 10 ± 2 | 10 ± 2 | 10 ± 2 | 12 ± 2 |
| Corner | 12 ± 2 | 12 ± 2 | 12 ± 2 | 13 ± 2 | |
| Bottom | 12 ± 2 | 12 ± 2 | 12 ± 2 | 14 ± 3 | |
| Radius R | R:457 | R:508 | R:558 | R:610 | |
| Radius r | r:88.9 | r:90 | r:127 | r:120 | |
Chemical Composition
| Series | Fe | AL | K | Na | Ca | Mg | B | Cr | Cu | Ni | P | Mn | Ti | Li |
| RBC1 | 0.30 | 20 | 0.60 | 0.80 | 0.89 | 0.17 | 0.07 | <0.05 | <0.05 | 0.05 | 0.07 | 0.50 | 2.0 | 0.58 |
| RBC2 | 0.21 | 15 | 0.50 | 0.70 | 0.60 | 0.20 | 0.07 | <0.05 | <0.05 | 0.05 | 0.07 | 0.05 | 1.27 | 0.50 |
| RBC3 | 0.21 | 15 | 0.50 | 0.70 | 0.60 | 0.17 | 0.07 | <0.05 | <0.05 | 0.05 | 0.07 | 0.05 | 0.86 | 0.50 |
| Grade | Fe | AL | K | Na | Ca | Mg | B | Cr | Ni | P | Ti | Li | OH |
| Synthesis | 25 | 20 | 1 | 8 | 23 | 9 | 10 | 2 | 1 | 10 | 25 | 1 | 50 |
| Semi | 0.20 | 7.50 | 0.10 | 0.30 | 0.50 | 0.05 | 0.04 | <0.05 | 0.05 | 0.02 | 1.27 | 0.20 | 50 |
| PV | 0.20 | 15 | 0.90 | 0.70 | 0.60 | 0.05 | 0.07 | <0.05 | 0.05 | 0.05 | 1.40 | 0.70 | 50 |
